Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Micro-coordinate measuring machines (micro-CMMs) for microcomponents require a probe system with tip diameter of several tens to hundreds micrometers. Scale effects work such small tip, i.e., the tends stick on measurement surface via adhesion forces. These forces significantly deteriorate probing resolution or repeatability. Therefore, realize micro-CMMs, many researchers have proposed microprobe systems that use various surface-sensing principles compared conventional CMM probes. In this review, were focus, and characteristics reviewed. First, summarized, performance trends identified. Then, individual different sensing was described clarify each principle. By comprehensively summarizing multiple types discussing their characteristics, study contributed identifying limitations micro-probe system. Accordingly, future development micro-CMMs probes is discussed.